英语翻译ThePSII（等离子体源离子注入）chamberwaspumpedouttobasepressureoflessthan9.5×10−5Pausingacombinationofrotaryandturbomolecularpumps.Duringimplantation,thechamberwaskeptat13mPabyintroducing30sc

Question

英语翻译
The PSII（等离子体源离子注入） chamber was pumped out to base pressure of less
than 9.5×10−5 Pa using a combination of rotary and turbo
molecular pumps.During implantation,the chamber was kept at
13 mPa by introducing 30 sccm nitrogen into the chamber.

Answer 1

等离子体源离子注入腔用组合式回转涡轮分子泵泵出到基准压力（低于9.5×10−5 帕斯卡）.在灌输期间,腔室通过引入30SCCM的氮气压力保持在13 兆帕.